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多晶硅超纯水设备

多晶硅超纯水设备

  多晶硅超纯水设备主要用在多晶硅片清洗中,多晶硅片,半导体器件生产中硅片须经严格清洗。微量污染也会导致器件失效。清洗的目的在于清除表面污染杂质,包括有机物和无机物。这些杂质有的以原子状态或离子状态,有的以薄膜形式或颗粒形式存在于硅片表面。有机污染包括光刻胶、有机溶剂残留物、合成蜡和人接触器件、工具、器皿带来的油脂或纤维。无机污染包括重金属金、铜、铁、铬等,严重影响少数载流子寿命和表面电导;碱金属如钠等,引起严重漏电,颗粒污染包括硅渣、尘埃、细菌、微生物、有机胶体纤维等,会导致各种缺陷。

  WEISHENMEGUANGFUXINGYEJINGTIGUAN、BANDAOTIJICHENGDIANLUQINGXIYIDINGYAOYONGCHAOCHUNSHUI

  ZAIJINGTIGUAN、JICHENGDIANLUSHENGCHANZHONG,CHUNSHUIZHUYAOYONGYUQINGXIGUIPIAN,LINGYOUSHAOLIANGYONGYUYAOYEPEIZHI,GUIPIANYANGHUADESHUIQIYUAN,BUFENSHEBEIDELENGQUESHUI,PEIZHIDIANDUYEDENG。JICHENGDIANLUSHENGCHANGUOCHENGZHONGDE80%DEGONGXUXUYAOSHIYONGGAOCHUNSHUIQINGXIGUIPIAN,SHUIZHIDEHAOHUAIYUJICHENGDIANLUDECHANPINZHILIANGJISHENGCHANCHENGPINLVGUANXIHENDA。SHUIZHONGDEJIANJINSHU(K、NaDENG)HUISHIJUEYUANMONAIYABULIANG,ZHONGJINSHU(Au、Ag、CuDENG)HUISHIPNJIENAIYAJIANGDI,ⅢZUYUANSU(B、Al、GaDENG)HUISHINXINGBANDAOTITEXINGEHUA,ⅤZUYUANSU(P、As、SbDENG)HUISHIPXINGBANDAOTITEXINGEHUA,SHUIZHONGXIJUNGAOWENTANHUAHOUDELIN(YUEZHANHUIFENDE20-50%)HUISHIPXINGGUIPIANSHANGDEJUBUQUYUBIANWEINXINGGUIERDAOZHIQIJIANXINGNENGBIANHUAI,SHUIZHONGDEKELI(BAOKUOXIJUN)RUXIFUZAIGUIPIANBIAOMIAN,JIUHUIYINQIDIANLUDUANLUHUOTEXINGBIANCHA。JICHENGDIANLU(DRAM)JICHENGDU16KDEYAOQIUSHIDIANZULV16ZHAOOUYISHANG,JICHENGDIANLU(DRAM)JICHENGDU64KDEYAOQIUSHIDIANZULV16ZHAOOUYISHANG,JICHENGDIANLU(DRAM)JICHENGDU256KDEYAOQIUSHIDIANZULV≥17 MΩ•cm,JICHENGDIANLU(DRAM)JICHENGDU1MDEYAOQIUDIANZULV≥18MΩ•cm,JICHENGDIANLU(DRAM)JICHENGDU4MDEYAOQIUDIANZULV≥18MΩ•cm,JICHENGDIANLU(DRAM)JICHENGDU16MDEYAOQIUDIANZULV≥18.2MΩ•cm。

超纯水设备

  ZHIXINGBIAOZHUN

企鹅电竞  JBT 7621-1994 DIANLIBANDAOTIQIJIANGONGYIYONGGAOCHUNSHUI

  GBT11446.1-2013DIANZIJICHAOCHUNSHUIZHONGGUOGUOJIABIAOZHUN

企鹅电竞  GB6682-2000ZHONGGUOGUOJIASHIYANSHIYONGSHUIGB6682-2000

  ASTM D5127-2007MEIGUODIANZIHEBANDAOTISHUIZHIBIAOZHUN

  GB/T 11446.3——1997 DIANZIJISHUICESHIFANGFATONGZE

企鹅电竞  GB/T 11446.4——l997 DIANZIJISHUIDIANZULVDECESHIFANGFA

  GB/T 11446.5——1997 DIANZIJISHUIZHONGHENLIANGJINSHUDEYUANZIXISHOUFENGUANGGUANGDUCESHIFANGFA

  GB/T 11446.6——1997 DIANZIJISHUIZHONGERYANGHUAGUIDEFENGUANGGUANGDUCESHIFANGFA

  GB/T 11446.7——1997 DIANZIJISHUIZHONGHENLIANGLVLIZI、XIAOSUANGENLIZI、LINSUANGENLIZI、LIUSUANGENLIZIDELIZISEPUCESHIFANGFA

企鹅电竞  GB/T 11446.8——1997 DIANZIJISHUIZHONGZONGYOUJITANDECESHIFANGFA

  GB/T 11446.9——1997 DIANZIJISHUIZHONGWEILIDEYIQICESHIFANGFA

  GB/T 11446.10——1997 DIANZIJISHUIXIJUNZONGSHUDELVMOPEIYANGCESHIFANGFA

企鹅电竞  WOSIZHENGHELEGUONEIWAIXIANJINDEGONGYIJIJISHU,CAIYONGYUCHULI+SHUANGJIFANSHENTOU+EDI+SHUANGJIPAOGUANGHUNCHUANG+ZHONGDUANLVQI。

  CHAOCHUNSHUIYIFANGMIANZAIYUZHISHUIGONGYI,LINGWAIYIGEZHONGYAODEFANGMIANZAIYUCHAOCHUNSHUIDESHUSONG,WOSICAIYONGPVDFCAIZHIGUANDAO,BAOZHENGZHONGDUANYONGSHUIDIANDESHUIZHIDADAOSHIYONGYAOQIU。